Last updated: 25/12/2018

Growth Facilities
    UHV MBE/sputter
    HiTUS

Nanofabrication
    e-beam lithography
    Photolithography
    FIB
    Cleanroom

Characterisation
    Probe station
    XRD
    GHz pulse measurement
    Dilution refrigerator
    VSM
    AGFM
    MR prober
    Annealing furnace
    MOKE
    HRTEM/STEM
    TEM
    SEM
    SPM
    Sample preparation
    Particle analyser

Departmental Cleanroom

Class 100 Cleanroom

Class 100 cleanroom
This area is dedicated to film deposition and analysis:
  • Scanning electron microscope (SEM)
  • Annealing furnace
  • Plasma chemical vapor deposition (CVD)
  • Thermal evaporator
  • Wire bonder

Class 1000 Cleanroom (Yellow room)

Class 1000 cleanroom
In the yellow room, it is equipped with the following items: