Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

Kok, P., Boto, A.N., Abrams, D.S., Williams, C.P., Braunstein, S.L. and Dowling, J.P.
(2001): Physical Review A 63, 063407/1-8. (PDF)

ABSTRACT: As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology.